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@inproceedings{TUW-288573,
    author = {Grahmann, Jan and Schroedter, Richard and Kiethe, Oliver and Todt, Ulrich},
    title = {Vibration analysis of micro mirrors for LIDAR using on-chip piezo-resistive sensor},
    booktitle = {Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX},
    year = {2020},
    numpages = {12},
    url = {https://publik.tuwien.ac.at/files/publik_288573.pdf},
    doi = {10.1117/12.2551600},
    keywords = {MEMS-Scanner, LIDAR, vibration, electrostatic, reliability, trajectory precision, quasi-static},
    note = {talk: SPIE Photonics West 2020, San Francisco; 2020-02-01 -- 2020-02-06}
}