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@inproceedings{TUW-289906,
    author = {Fuerst, Martin and Berlakovich, Nikolaus and Csencsics, Ernst and Schitter, Georg},
    title = {Self-Aligning Scanning Shack-Hartmann Sensor for Automatic Wavefront Measurements of High-NA Optics},
    booktitle = {Proceedings of the IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2020)},
    year = {2020},
    numpages = {6},
    url = {https://publik.tuwien.ac.at/files/publik_289906.pdf},
    doi = {10.1109/I2MTC43012.2020.9128499},
    keywords = {Shack-Hartmann wavefront sensor, Dynamic range extension, Optical metrology, Automatic optical inspection, Quality management},
    note = {talk: IEEE International Instrumentation and Measurement Technology Conference Proceedings I2MTC (2020), Dubrovnik, Kroatien; 2020-05-25 -- 2020-05-28}
}