[Back]

@article{TUW-290470,
    author = {Yoo, Han Woong and Albert, Stephan and Schitter, Georg},
    title = {Accurate Analytic Model of a Parametrically Driven Resonant MEMS Mirror with a Fourier Series Based Torque Approximation},
    journal = {Journal Of Microelectromechanical Systems},
    year = {2020},
    volume = {29},
    number = {6},
    pages = {1431--1442},
    url = {https://publik.tuwien.ac.at/files/publik_290470.pdf},
    doi = {10.1109/JMEMS.2020.3024752},
    keywords = {Mirrors , Micromechanical devices , Torque , Analytical models , Mathematical model , Capacitance , Fourier series}
}