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@article{TUW-291040,
    author = {Fuerst, Martin and Csencsics, Ernst and Berlakovich, Nikolaus and Schitter, Georg},
    title = {Automated Measurement of Highly Divergent Optical Wavefronts with a Scanning Shack-Hartmann Sensor},
    journal = {IEEE Transactions on Instrumentation and Measurement},
    year = {2020},
    url = {https://publik.tuwien.ac.at/files/publik_291040.pdf},
    doi = {10.1109/TIM.2020.3038002},
    keywords = {Shack-Hartmann wavefront sensor, Dynamic range extension, Optical metrology, Automatic optical inspection, Quality management, Error Budgeting}
}