@inproceedings{TUW-292461,
author = {Schroedter, Richard and Yoo, Han Woong and Brunner, David and Schitter, Georg},
title = {Capacitive Charge-based Self-Sensing for Resonant Electrostatic MEMS mirrors},
booktitle = {Proceedings of the 21st IFAC World Congress},
year = {2020},
numpages = {6},
url = {https://publik.tuwien.ac.at/files/publik_292461.pdf},
keywords = {Resonant MEMS mirror, electrostatic comb drive, capacitive charge sensing, nonlinear observer with switched input},
note = {Vortrag: 21st IFAC World Congress, Berlin; 2020-07-12 -- 2020-07-17}
}
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.