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@article{TUW-295905,
    author = {Yoo, Han Woong and Albert, Stephan and Schitter, Georg},
    title = {Fourier Series based Analytic Model of a Resonant MEMS Mirror for General Voltage Inputs},
    journal = {Journal Of Microelectromechanical Systems},
    year = {2021},
    volume = {30},
    number = {3},
    pages = {343--359},
    url = {https://publik.tuwien.ac.at/files/publik_295905.pdf},
    doi = {10.1109/JMEMS.2021.3072795},
    keywords = {Mirrors , Micromechanical devices , Analytical models , Mathematical model , Torque , Capacitance , Frequency measurement}
}