@article{TUW-296752,
author = {Brunner, David and Albert, Stephan and Hennecke, Markus Edward and Darrer, Franz and Schitter, Georg},
title = {Self-sensing control of resonant MEMS scanner by comb-drive current feedback},
journal = {Mechatronics},
year = {2021},
volume = {78},
url = {https://publik.tuwien.ac.at/files/publik_296752.pdf},
doi = {10.1016/j.mechatronics.2021.102631},
keywords = {Micro-electro-mechanical system (MEMS), Nonlinear systems, Phase locked loop (PLL), Precision control, Resonant scanning mirror, Self-sensing}
}
Created from the Publication Database of the Vienna University of Technology.