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@article{TUW-296752,
    author = {Brunner, David and Albert, Stephan and Hennecke, Markus Edward and Darrer, Franz and Schitter, Georg},
    title = {Self-sensing control of resonant MEMS scanner by comb-drive current feedback},
    journal = {Mechatronics},
    year = {2021},
    volume = {78},
    url = {https://publik.tuwien.ac.at/files/publik_296752.pdf},
    doi = {10.1016/j.mechatronics.2021.102631},
    keywords = {Micro-electro-mechanical system (MEMS), Nonlinear systems, Phase locked loop (PLL), Precision control, Resonant scanning mirror, Self-sensing}
}



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