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@article{TUW-299022,
    author = {Schroedter, Richard and Yoo, Han Woong and Brunner, David and Schitter, Georg},
    title = {Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors},
    journal = {Journal Of Microelectromechanical Systems},
    year = {2021},
    volume = {30},
    number = {6},
    pages = {897--906},
    url = {https://publik.tuwien.ac.at/files/publik_299022.pdf},
    doi = {10.1109/JMEMS.2021.3107797},
    keywords = {Charge-based capacitive self-sensing , resonant MEMS mirror , electrostatic comb drive , switched current integrator , capacitance network , nonlinear switched input Luenberger observer}
}