@inproceedings{TUW-299517,
author = {Hackl, Thomas and Poik, Matthias and Schitter, Georg},
title = {Automated Probe-Sample Alignment for the Evaluation of Integrated Circuits},
booktitle = {Proceedings of the Advanced Intelligent Mechatronics Conference 2020},
year = {2021},
note = {Posterpr{\"a}sentation: 2021 IEEE International Conference on Advanced Intelligent Mechatronics (AIM), Delft, Netherlands; 2021-07-12 -- 2021-07-16}
}
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.