[Back]

@misc{TUW-299886,
    author = {Schroedter, Richard and Brunner, David and Darrer, Franz and Hennecke, Markus Edward and Schitter, Georg and Yoo, Han Woong},
    title = {Capacitive Charge Based Self-Sensing And Position Observer For Electrostatic Mems Mirrors},
    year = {2021},
    howpublished = {patent},
    note = {submitted: 2019-02-18, granted: 2021-09-02}
}