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@article{TUW-303645,
    author = {Wertjanz, Daniel and Csencsics, Ernst and Kern, Thomas and Schitter, Georg},
    title = {Bringing the lab to the fab: Robot-based inline measurement system for precise 3D surface inspection in vibrational environments},
    journal = {IEEE Transactions on Industrial Electronics},
    year = {2022},
    url = {https://publik.tuwien.ac.at/files/publik_303645.pdf},
    doi = {10.1109/TIE.2022.3151959},
    keywords = {Three-dimensional displays , Robots , Service robots , Vibration measurement , Position measurement , Sensors , Semiconductor device measurement}
}