Talks and Poster Presentations (with Proceedings-Entry):
A. Glaninger, A. Jachimowicz, F. Kohl, R. Chabicovsky, G. Urban:
"Wide Range Semiconductor Flow Sensors";
Poster: EUROSENSORS XIII, 13th European Conf. On Solid-State Transducers,
The Hague, The Netherlands;
1999-09-12
- 1999-09-15; in: "Abstracts of the 13th European Conference On Solid-State Transducers",
(1999),
477
- 480.
English abstract:
Micromachined flow sensors based on thin film germanium thermistors offer high flow sensitivities and short response times. Using the controlled overtemperature scheme the measurable air flow velocity ranges from ±0.01 m/s to ±200 m/s. With the achieved velocity measuring range of more than four orders of magnitude this measuring system fits the requirements of most industrial tasks. The sensors show a response time of less than 20 ms to large step changes of the air velocity. Using a lookup table transformation a linearized output signal can be obtained within 25 µs. An air flow measuring range from 1.3 cm3/h to at least 4000 cm3/h has been demonstrated e.g. in a rectangular flow channel of 0.5 mm2 cross sectional area.
Created from the Publication Database of the Vienna University of Technology.