Publications in Scientific Journals:
M. Gazicki, H. Szimanowski, J. Tyczkowski, J. Schalko, F. Olcaytug:
"Correlation between gas phase composition of RF plasma of argon diluted tetraethylgermanium and chemical structure of ..";
Journal of Vacuum Science & Technology A,
A14
(1996),
(5);
2835
- 2841.
English abstract:
Correlation between gas phase composition of RF plasma of argon diluted tetraethylgermanium and chemical structure of therewith deposited Ge/C film
Created from the Publication Database of the Vienna University of Technology.