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Publications in Scientific Journals:

C. Pichler, R. Plasun, R. Strasser, S. Selberherr:
"Simulation of Complete VLSI Fabrication Processes with Heterogeneous Simulation Tools";
IEEE Transactions on Semiconductor Manufacturing, 12 (1999), 1; 76 - 86.



"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/66.744527

Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_1999/JB1999_Pichler_1.pdf


Created from the Publication Database of the Vienna University of Technology.