Publications in Scientific Journals:
H. Kirchauer, S. Selberherr:
"Three-Dimensional Photolithography Simulation";
IEEE Journal of Technology Computer Aided Design,
1
(1997),
6;
1
- 37.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/TCAD.1996.6449163
Electronic version of the publication:
http://www.iue.tuwien.ac.at/htmlpapers/kirchauer-jun97/
Created from the Publication Database of the Vienna University of Technology.