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Publications in Scientific Journals:

W. Bohmayr, A. Burenkov, J. Lorenz, H. Ryssel, S. Selberherr:
"Monte Carlo Simulation of Silicon Amorphization during Ion Implantation";
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 17 (1998), 12; 1236 - 1243.



"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/43.736563

Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_1999/JB1998_Bohmayr_1.pdf


Created from the Publication Database of the Vienna University of Technology.