Publications in Scientific Journals:
W. Pyka, P. Fleischmann, B. Haindl, S. Selberherr:
"Three-Dimensional Simulation of HPCVD - Linking Continuum Transport and Reaction Kinetics with Topography Simulation";
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems,
18
(1999),
12;
1741
- 1749.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/43.811323
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2000/JB1999_Pyka_1.pdf
Created from the Publication Database of the Vienna University of Technology.