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E. Chatzitheodoridis, D. Petrovic, A. Almansa, O. Del Medico, G. Popovic, H. Detter:
"A Semi-Automatic, Modular Microassembly Station assisted by Image Processing";
Talk: iMEMS, Singapore; 07-04-2001 - 07-06-2001; in: "Proceedings of the international MEMS Workshop 2001", F. Tay Eng Hock (ed.); Future Techno Designs Pte. Ltd., Singapore (2001), ISBN: 981-04-4165-7; 587 - 594.

A general-purpose assembly system for MEMS devices has been developed. Main characteristics are its modularity, expandability, fully interactive visual computer control, small size and low cost. Operation is manual by using a 3D mouse or semi-automatic for routine operations using visual pattern recognition. Control software is based on easily configured ActiveX objects with drag & drop functionality. A set of grippers have been also fabricated, one with force control. It is intended that such a system will assist in handling and assembly of small number of specialised MEMS devices with sizes ranging from a few microns up to the mm level. Through the easy and straightforward operation, the user is capable of acquiring experience in handling and assembly in the microscale. Its semi-automatic computer operation, with capabilities to be expanded further, will reduce the strain of users working under the microscope to perform precision operations.