S. Selberherr, E. Langer:
"Three Dimensional Process and Device Modeling";
Microelectronics Journal (invited), 20 (1989), 1-2; 113 - 127.
http://dx.doi.org/10.1016/0026-2692(89)90126-2Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/JB1989_Selberherr_1.pdf