Talks and Poster Presentations (with Proceedings-Entry):
C. Heitzinger, J. Fugger, O. Häberlen, S. Selberherr:
"Simulation and Inverse Modeling of TEOS Deposition Processes Using a Fast Level Set Method";
Poster: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD),
Kobe, Japan;
2002-09-04
- 2002-09-06; in: "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)",
(2002),
ISBN: 4-89114-027-5;
191
- 194.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/SISPAD.2002.1034549
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2003/CP2002_Heitzinger_3.pdf
Created from the Publication Database of the Vienna University of Technology.