Talks and Poster Presentations (with Proceedings-Entry):
E. Strasser, S. Selberherr:
"A General Simulation Method for Etching and Deposition Processes";
Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP),
Wien;
1993-09-07
- 1993-09-09; in: "Proceedings SISDEP 93 Conference",
(1993),
ISBN: 3-211-82504-5;
357
- 360.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1007/978-3-7091-6657-4_88
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_1994/CP1993_Strasser_1.pdf
Created from the Publication Database of the Vienna University of Technology.