Doctor's Theses (authored and supervised):
C. Heitzinger:
"Simulation and Inverse Modeling of Semiconductor Manufacturing Processes";
Supervisor, Reviewer: S. Selberherr, R. Chabicovsky;
Institut für Mikroelektronik,
2002;
oral examination: 2002-12-20.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.34726/hss.2002.03696962
Electronic version of the publication:
http://www.iue.tuwien.ac.at/phd/heitzinger
Created from the Publication Database of the Vienna University of Technology.