Publications in Scientific Journals:
W. Bohmayr, A. Burenkov, J. Lorenz, H. Ryssel, S. Selberherr:
"Trajectory Split Method for Monte Carlo Simulation of Ion Implantation";
IEEE Transactions on Semiconductor Manufacturing,
8
(1995),
4;
402
- 407.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/66.475181
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_1995/JB1995_Bohmayr_1.pdf
Created from the Publication Database of the Vienna University of Technology.