Publications in Scientific Journals:
N. Khalil, J. Faricelli, C. Huang, S. Selberherr:
"Two-Dimensional Dopant Profiling of Submicron MOSFET Using Nonlinear Least Squares Inverse Modeling";
Journal of Vacuum Science & Technology B,
14
(1996),
1;
224
- 230.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1116/1.589033
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_1996/JB1996_Khalil_1.pdf
Created from the Publication Database of the Vienna University of Technology.