Talks and Poster Presentations (with Proceedings-Entry):
A. Burenkov, W. Bohmayr, J. Lorenz, H. Ryssel, S. Selberherr:
"Analytical Model for Phosphorus Large Angle Tilted Implantation";
Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP),
Erlangen;
1995-09-06
- 1995-09-08; in: "Proceedings SISDEP 95 Conference",
(1995),
ISBN: 3-211-82736-6;
488
- 491.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1007/978-3-7091-6619-2_118
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_1996/CP1995_Burenkov_1.pdf
Created from the Publication Database of the Vienna University of Technology.