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Publications in Scientific Journals:

P. Pichler, W. Jüngling, S. Selberherr, E. Guerrero, H. Pötzl:
"Simulation of Critical IC-Fabrication Steps";
IEEE Transactions on Electron Devices, 32 (1985), 10; 1940 - 1953.



"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/T-ED.1985.22226

Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_1986/JB1985_Pichler_2.pdf


Created from the Publication Database of the Vienna University of Technology.