S. Selberherr:
"Process and Device Modeling for VLSI";
Microelectronics Reliability (invited), 24 (1984), 2; 225 - 257.
http://dx.doi.org/10.1016/0026-2714(84)90450-5Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/JB1984_Selberherr_1.pdf