Talks and Poster Presentations (with Proceedings-Entry):
A. Sheikholeslami, C. Heitzinger, T. Grasser, S. Selberherr:
"Three-Dimensional Topography Simulation for Deposition and Etching Processes Using a Level Set Method";
Talk: International Conference on Microelectronics (MIEL),
Nis;
2004-05-16
- 2004-05-19; in: "Proceedings of the International Conference on Microelectronics (MIEL)",
(2004),
ISBN: 0-7803-8166-1;
241
- 244.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/ICMEL.2004.1314606
Online library catalogue of the TU Vienna:
http://aleph.ub.tuwien.ac.at/F?base=tuw01&func=find-c&ccl_term=AC04967485
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2004/CP2004_Sheikholeslami_1.pdf
Related Projects:
Project Head Siegfried Selberherr:
Development of a Topography Computer-Aid
Created from the Publication Database of the Vienna University of Technology.