Publications in Scientific Journals:
C. Heitzinger, A. Sheikholeslami, F. Badrieh, H. Puchner, S. Selberherr:
"Feature-Scale Process Simulation and Accurate Capacitance Extraction for the Backend of a 100-nm Aluminum/TEOS Process";
IEEE Transactions on Electron Devices,
51
(2004),
7;
1129
- 1134.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/TED.2004.829868
Online library catalogue of the TU Vienna:
http://aleph.ub.tuwien.ac.at/F?base=tuw01&func=find-c&ccl_term=AC04967533
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2005/JB2004_Heitzinger_4.pdf
Related Projects:
Project Head Siegfried Selberherr:
SIM
Created from the Publication Database of the Vienna University of Technology.