Publications in Scientific Journals:
A. Sheikholeslami, F. Parhami, H. Puchner, S. Selberherr:
"Planarization of Silicon Dioxide and Silicon Nitride Passivation Layers";
Journal of Physics: Conference Series,
61
(2007),
1051
- 1055.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1088/1742-6596/61/1/208
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2007/JB2007_Sheikholeslami_1.pdf
Created from the Publication Database of the Vienna University of Technology.