[Back]


Publications in Scientific Journals:

A. Sheikholeslami, F. Parhami, H. Puchner, S. Selberherr:
"Planarization of Silicon Dioxide and Silicon Nitride Passivation Layers";
Journal of Physics: Conference Series, 61 (2007), 1051 - 1055.



"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1088/1742-6596/61/1/208

Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2007/JB2007_Sheikholeslami_1.pdf


Created from the Publication Database of the Vienna University of Technology.