Publications in Scientific Journals:
S. Holzer, A. Sheikholeslami, M. Karner, T. Grasser, S. Selberherr:
"Comparison of Deposition Models for a TEOS LPCVD Process";
Microelectronics Reliability,
47
(2007),
4-5;
623
- 625.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.microrel.2007.01.058
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2007/JB2007_Holzer_1.pdf
Created from the Publication Database of the Vienna University of Technology.