[Zurück]

R. Wittmann, S. Selberherr:
"A Study of Ion Implantation into Crystalline Germanium";
Solid-State Electronics, 51 (2007), 6; S. 982 - 988.

http://dx.doi.org/10.1016/j.sse.2007.03.019

http://www.iue.tuwien.ac.at/pdf/ib_2008/JB2007_Wittmann_1.pdf