Zeitschriftenartikel:
D. Andrijasevic, W. Smetana, J. Zehetner, S. Zoppel, W. Brenner:
"Aspects of micro structuring Low Temperature Cofired Ceramic (LTCC) for realisation complex 3D objects by embossing";
Microelectronic Engineering,
84
(2007),
5-8;
S. 1198
- 1201.
Kurzfassung englisch:
The purpose of this paper is to demonstrate the possibilities for structuring unfired low temperature co-fired ceramic (LTCC) in order
to obtain complex 3D-micro structures using specially designed and developed tools for embossing process. The focus will be on the
fabrication of different structures with potential use in MOEMS or Bio-MEMS applications. Motivation for selection of LTCC for these
applications in addition to fabrication of the structures will be explained in details. Preliminary investigation and optical inspection by means of the surface quality is performed at scanning electron microscope and non-contact optical profilometer. Based on obtained
results, first improvements are introduced.
Schlagworte:
MEMS structuring; Ceramic; Embossing
Zugeordnete Projekte:
Projektleitung Werner Brenner:
Methoden und Werkzeuge für Handhabung und Montage in der Mikrodimension (Tech. abgeschlossen 2007)
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.