Publications in Scientific Journals:
J. Cervenka, H. Ceric, S. Selberherr:
"Three-Dimensional Simulation of Sacrificial Etching";
Microsystem Technologies - Micro- and Nanosystems - Information Storage and Processing Systems,
14
(2008),
4-5;
665
- 671.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1007/s00542-007-0491-1
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2008/JB2007_Cervenka_1.pdf
Created from the Publication Database of the Vienna University of Technology.