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M. Paroha, E. Benes, L. Spassov, B. Bode, R. Schnitzer, M. Gröschl:
"Prototypes of resonant piezoelectric BAW sensors for various physical measurands";
in: "Proc. 2nd Congress of Alps-Adria Acoustics Association and 1st Congress of Acoustical Society of Croatia", Acoustical Society of Croatia, Zagreb/Croatia, 2005, ISBN: 953-95097-0-x, S. 158 - 164.

Prototypes of new resonant piezoelectric bulk acoustic wave (BAW) sensors were designed and manufactured.
Physical quantities measurable with these new sensors are: viscosity and density of liquids, humidity, temperature,
liquid (lubrication) film thickness and speed of sound in liquids. The functional parts of all sensors are piezoelectric
resonators with different parameters optimised for each particular sensor. Similar physical principles of operation
of all sensors allow to use an uniform operating and driving electronics, cabling and software and thereby reducing the
price of the overall system. The sensors are dedicated for industrial applications, leading to special demands on their
design, such as reducing dimensions, use of materials suitable for food industry and medicine, high temperature and
pressure resistance (up to 200 °C and 10 bar), possibility of easy cleaning, etc. As an example, a combined sensor for
viscosity (QV) and temperature (QT) within one sensor housing and with one common connecting cable is presented in
more detail; sensor functions and design features are explained and results of measurements are discussed.
Key words: sensor, piezoelectric resonator, ultrasound, viscosity, density, temperature

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