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E. Badisch, C. Mitterer, P.H. Mayrhofer, G. Mori, R.J. Bakker, J. Brenner, H. Störi:
"Characterization of tribo-layers on self-lubricating PACVD TiN coatings";
Thin Solid Films, 460 (2004), 1-2; 125 - 132.

and thus longer lifetime in severe tribological applications.The aim of this study is to characterize tribo-layers formed during
ball-on-disc testing on low-friction, Cl-containing TiN coatings deposited by plasma assisted chemical vapor deposition and to
clarify their formation mechanism.Characterization of the transfer layers was done by optical microscopy, optical profilometry,
Raman spectroscopy, Auger electron spectroscopy and X-ray photoelectron spectroscopy.Differ ential scanning calorimetry was
used to provide information on the chlorine-influenced chemical reactions of the coatings in ambient air.Ir on oxide layers of a
thickness in the nm-range have been found on low-chlorine containing TiN coatings (-3 at.% Cl) showing friction coefficients
of approximately 0.8, whereas on TiN coatings with higher chlorine contents ()3 at.% Cl) rutile layers were preferably formed,
resulting in friction coefficients below 0.2. This self-lubrication mechanism can be explained by the in-situ formation of easyshearable
titanium oxides in the contact zone in the presence of humidity and oxygen.
2004 Elsevier B.V. All rights reserved.
Keywords: Plasma-assisted chemical vapor deposition; TiN coating; Low-friction; Chlorine; Solid lubrication

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