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C. Eitzinger, J. Fikar, C. Forsich, J. Humlicek, A. Krüger, R. Kullmer, J. Laimer, E. Lingenhöle, K. Lingenhöle, M. Mühlberger, T. Müller, H. Störi, U. Wielsch:
"Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes";
Materials Science Forum, 518 (2006), 423 - 430.

Modern material technology relies increasingly on processes for surface modification and
coating. Generally, we are lacking a possibility to monitor the progress of such processes. Thus the
outcome can only be analyzed after the end of the whole process cycle. We are proposing to use
spectroscopic ellipsometry (SE) as an on-line monitoring tool. SE, as an optical method, is not
affected by high temperatures, process gases, plasmas, etc. It can be used as a monitoring tool or a
sensor for closed loop control of processes. The main difficulty is the on-line interpretation of SE
data. Depending on the nature of the process monitored or controlled, different models are used for
the interpretation. These models predict the SE response depending on different parameters
describing the surface under investigation. A fitting process is used to solve the inverse problem,
i.e. extracting material data from the SE spectra. We expect increased process stability and shorter
development time as a practical benefit from the use of SE.

Closed Loop Control, On-line Monitor, Nitriding, Spectroscopic Ellipsometry, Surface Treatment

http://aleph.ub.tuwien.ac.at/F?base=tuw01&func=find-c&ccl_term=AC06588026