[Zurück]

W.S.M. Werner, W. Smekal, C.J. Powell:
"NIST Database for the Simulation of Electron Spectra for Surface Analysis (SESSA)";
Vortrag: Workshop Modeling and Data for Electron Spectroscopies: Standardization of Surface Analysis Techniques, Brussels/BE; 14.09.2006.

NIST released its new Database for
the Simulation of Electron Spectra for Surface Analysis (SESSA) in December, 2005
[1]. SESSA can be used for two main applications in AES and XPS [2-4]. First, data
are provided for the many parameters needed by a user to derive quantitative information
from AES and XPS spectra (differential inverse inelastic mean free paths, total inelastic
mean free paths, differential elastic-scattering cross sections, total elastic-scattering
cross sections, transport cross sections, photoionization cross sections, photoionization
asymmetry parameters, electron-impact ionization cross sections, photoelectron lineshapes,
Auger-electron lineshapes, fluorescence yields, and Auger-electron backscattering
factors). Second, AES and XPS spectra can be simulated for layered samples. The simulated
spectra, for layer compositions and thicknesses specified by the user, can be compared
with measured spectra. The layer compositions and thicknesses can then be adjusted
to find maximum consistency between simulated and measured spectra.A demonstration
will be given of the use of SESSA for applications in AES and XPS.1. http://www.nist.gov/srd/nist100.htm.2.
W. S. M. Werner, Surf. Interface Anal. 31, 141 (2001).3. W. S. M. Werner, Surf. Interface
Anal. 37, 846 (2005).4. W. Smekal, W. S. M. Werner, and C. J. Powell, Surf. Interface
Anal. 37, 1059 (2005).