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J. Zemek, P. Jiricek, W.S.M. Werner, B. Lesiak, A. Jablonski:
"Angular-resolved elastic peak electron spectroscopy: experiment and Monte Carlo calculations";
Surface and Interface Analysis, 38 (2006), 615 - 619.

Elastic peak electron spectroscopy (EPES) is widely applied for determining the inelastic mean free path(IMFP) of electrons, which is of crucial importance for quantitative electron spectroscopy. For this reason,it is highly desirable to verify the reliability of the EPES method for a variety of elements and differentexperimental geometries. In the present work, elastically backscattered electrons from Au, Ag, Cu, Fe andSiwere measured at different experimental geometries (fixed incidence angle along the surface normal andvarious emission angles) for selected electron energies: 200, 500 and 1000 eV. The experimental angulardistributions of elastically backscattered electrons were compared to the Monte Carlo (MC) calculationsby the conventional and the reverse simulations.Agreement between the results of conventional, reverse MC calculations and the experimental valuesof electron backscattering intensity was obtained. Application of the procedure for the surface-excitationcorrections resulted in better agreement between the simulated and the experimental data. Larger values ofdeviationwere observed for grazing emission angles, indicating inaccuracy of the correcting procedure andthe values of the material parameter, independent of the electron energy and the geometry of measurement.

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