Publications in Scientific Journals:
C.J. Powell, W.S.M. Werner, W. Smekal:
"Refined calculations of effective attenuation lengths for SiO2 film thicknesses by x-ray photoelectron spectroscopy";
Applied Physics Letters,
Electron effective attenuation lengths EALs for SiO2 films on Si are reported that were obtainedfrom Monte Carlo simulations of substrate Si 2p3/2 photoelectron transport for x-ray photoelectronspectroscopy XPS with Al K and Mg K x rays and SiO2 films of varying thicknesses. TheseEALs show a stronger dependence on SiO2 thickness than previous values found from anapproximate algorithm. Since recent XPS data for SiO2 can be analyzed satisfactorily withthickness-independent EALs, the results indicate that intrinsic excitations and/or variations ofinelastic-scattering probabilities near surfaces and interfaces appear to be significant in quantitative XPS.
Online library catalogue of the TU Vienna:
Created from the Publication Database of the Vienna University of Technology.