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Zeitschriftenartikel:

S. Dreer, P. Wilhartitz, B. Satory, R. Tessadri, K. Piplits, K. Mayerhofer:
"Accurate Determination of Trace Amounts of Oxygen in CrAlN Hard Coatings by a Combination of WDS-EPMA and SIMS";
Microchimica Acta, 155 (2006), S. 125 - 128.



Kurzfassung englisch:
Low amts. of oxygen in AlCrN hard coatings were quant. analyzed by WDS-electron-probe microanal. By combination with SIMS depth profiling, applying a calibration sample produced by ion implantation, the accuracy of the electron-probe microanal. results was proven. Values ≥0.07 at.% were measured and the calcd. detection limit is in the range of 0.01 at.%.

Schlagworte:
SIMS EPMA Hard coatings

Erstellt aus der Publikationsdatenbank der Technischen Universitšt Wien.