Publications in Scientific Journals:
S. Dreer, P. Wilhartitz, B. Satory, R. Tessadri, K. Piplits, K. Mayerhofer:
"Accurate Determination of Trace Amounts of Oxygen in CrAlN Hard Coatings by a Combination of WDS-EPMA and SIMS";
Microchimica Acta,
155
(2006),
125
- 128.
English abstract:
Low amts. of oxygen in AlCrN hard coatings were quant. analyzed by WDS-electron-probe microanal. By combination with SIMS depth profiling, applying a calibration sample produced by ion implantation, the accuracy of the electron-probe microanal. results was proven. Values ³0.07 at.% were measured and the calcd. detection limit is in the range of 0.01 at.%.
Keywords:
SIMS EPMA Hard coatings
Created from the Publication Database of the Vienna University of Technology.