[Zurück]

A. Kenda, M. Kraft, C. Wagner, B. Lendl, A. Wolter:
"MEMS-based Spectrometric Sensor for the Measurement of Dissolved CO2";
Vortrag: IEEE Sensors 2008, Lecce; 26.10.2008 - 29.10.2008; in: "Proceedings of IEEE Sensors 2008", (2008), ISBN: 978-1-4244-2580-8; S. 724 - 727.

In the last few years several types of MEMS-based
spectrometer systems emerged, mainly addressing the NIR
spectral range. The presented MEMS-based sensor prototype
operates in the mid-IR range between 2200 cm-1 and 2500 cm-1.
The main element is a blazed micro-electro-mechanical reflective
grating device with an aperture of 3x3 mm². The optical
setup of the sensor corresponds to a Czerny-Turner type
monochromator with an immense potential for further miniaturization
due to its MEMS core. This allows designing and
building competitively priced handheld analyzers for a range
of applications that up to now has been restricted to large and
expensive instruments. This work focuses on the development
of an analyzer for dissolved CO2 showing the methodology and
also first implementation steps towards a sensor solution.
CO2(aq) calibration samples were prepared by different
NaHCO3 concentrations in solution. Spectra and calibration
data acquired with the prototype are presented.

http://dx.doi.org/10.1109/ICSENS.2008.4716544

http://publik.tuwien.ac.at/files/PubDat_167608.pdf