R. Franz, J Neidhardt, C. Mitterer, H. Hutter, B. Satory, R. Tessadri, P. Polcik:
"Oxidation and diffusion processes during annealing of AlCrVN hard coatings";
Journal of Vacuum Science & Technology A,
V-alloyed AlCrN hard coatings were deposited by reactive arc evapn. in an industrial-sized deposition system and subsequently annealed in ambient air at temps. ranging from 550 to 700 C in order to study the formation mechanisms of the desired lubricious oxides. The oxidized samples were investigated by means of secondary ion mass spectrometry depth profiling, x-ray diffraction, Raman spectroscopy, and anal. transmission electron microscopy. Vanadium diffusion in the oxidized part of the coating leads to the formation of a V-rich top layer contg. AlVO4 and the desired lubricious oxide V2O5 followed by a V-depleted inner oxide layer consisting of a mixed or nanocryst. (Al,Cr,V)2O3 on top of the intact AlCrVN coating. (c) 2008 American Institute of Physics.
SIMS, oxidation, hard coatings
Erstellt aus der Publikationsdatenbank der Technischen Universitšt Wien.