Publications in Scientific Journals:
O. Ertl, S. Selberherr:
"Three-Dimensional Level Set Based Bosch Process Simulations using Ray Tracing for Flux Calculation";
Microelectronic Engineering,
87
(2010),
1;
20
- 29.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.mee.2009.05.011
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2009/JB2009_Ertl_2.pdf
Created from the Publication Database of the Vienna University of Technology.