Publications in Scientific Journals:
A Cvetanovic, A. Cvetanovic, A. Deutschinger, I. Giouroudi, W. Brenner:
"Design of a novel visual and control system for the prevention of the collision during the micro handling in a SEM chamber";
Microelectronic Engineering,
87
(2009),
2;
139
- 143.
English abstract:
This paper presents a video system for preventing a collision of the micro gripper and the stage on which the micro component is located during micro manipulation in the chamber of a scanning electron microscope. This system consists of a micro manipulation station, micro camera with magnification lenses and a reflective specimen stub. Special focus is given to the approach procedure of the micro gripper toward the micro component, a sequence that is crucial during a micro manipulation process. A new control program which replaced the original manual control of the micro manipulation station enables improved system performance, especially fine adjustment, positioning and manipulation.
Keywords:
Micro assembly; LabVIEW; FPGA; Piezo; DC motor; Micro gripper
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.mee.2009.06.031
Related Projects:
Project Head Werner Brenner:
Methoden und Werkzeuge für Handhabung und Montage in der Mikrodimension (Tech. abgeschlossen 2007)
Created from the Publication Database of the Vienna University of Technology.