Zeitschriftenartikel:
J. Matovic, Z. Jaksic:
"Simple and reliable technology for manufacturing metal-composite nanomembranes with giant aspect ratio";
Microelectronic Engineering,
86
(2009),
4-6;
S. 906
- 909.
Kurzfassung englisch:
A novel process for manufacturing of the ultrathin metal-composite structures (nanomembranes) is presented. Despite of minute thickness in the range of a few dozen of atomic layers and aspect ratio of near
1,000,000 the novel nanomembranes are robust enough to be handled in normal lab environment without a special care.
Schlagworte:
Nanofabrication;Ultrathin free-standing structures; Nanomembranes; Giant aspect ratio
"Offizielle" elektronische Version der Publikation (entsprechend ihrem Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.mee.2008.12.009
Erstellt aus der Publikationsdatenbank der Technischen Universität Wien.