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Publications in Scientific Journals:

J. Matovic, Z. Jaksic:
"Simple and reliable technology for manufacturing metal-composite nanomembranes with giant aspect ratio";
Microelectronic Engineering, 86 (2009), 4-6; 906 - 909.



English abstract:
A novel process for manufacturing of the ultrathin metal-composite structures (nanomembranes) is presented. Despite of minute thickness in the range of a few dozen of atomic layers and aspect ratio of near
1,000,000 the novel nanomembranes are robust enough to be handled in normal lab environment without a special care.

Keywords:
Nanofabrication;Ultrathin free-standing structures; Nanomembranes; Giant aspect ratio


"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1016/j.mee.2008.12.009


Created from the Publication Database of the Vienna University of Technology.