Talks and Poster Presentations (with Proceedings-Entry):
O. Ertl, L. Filipovic, S. Selberherr:
"Three-Dimensional Simulation of Focused Ion Beam Processing Using the Level Set Method";
Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD),
Bologna, Italy;
2010-09-06
- 2010-09-08; in: "Proceedings of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)",
(2010),
ISBN: 978-1-4244-7700-5;
49
- 52.
"Official" electronic version of the publication (accessed through its Digital Object Identifier - DOI)
http://dx.doi.org/10.1109/SISPAD.2010.5604573
Electronic version of the publication:
http://www.iue.tuwien.ac.at/pdf/ib_2010/CP2010_Ertl_1.pdf
Created from the Publication Database of the Vienna University of Technology.