Publications in Scientific Journals:
J. Yunas, J. Johari, A. Hamzah, ?. Mimiwaty, I. Gebeshuber, B. Majlis:
"Design and Fabrication of MEMS Micropumps using Double Side Etching";
Journal of Microelectronics and Electronic Packaging,
In this paper, we report a simple technique for the fabrication of planar valveless micropumps. The technique utilizes MEMS fabrication methods by using a double sided etch technique. Instead of using several masks and process steps, an anisotropic wet etch technique at both sides of a silicon substrate is implemented at the same time for creating the pump membrane and the diffuser/nozzle elements. A planar diffuser and a nozzle element of the pump, as well as a 150 mm thick silicon membrane, are designed and fabricated using only three pattern process steps. An actuator-chamber and a pump-chamber with depths of 250 um are formed after 250 min KOH etching, while the diffuser/nozzle element with a depth of 50 um are sequentially formed after chamber forming. The process is simple and reproducible which opens the opportunity for fast prototyping of MEMS micropumps.
Created from the Publication Database of the Vienna University of Technology.